A 12-GHz DPDT RF-MEMS Switch with Layer-Wise Waveguide/Actuator Design Technique


A novel design of double-pole double-throw (DPDT) RF-MEMS switch for 12-GHz phase shifter has been developed to minimize the electrical crosstalk between the signal waveguide and electrostatic actuator by allocating them in separate layers of an SOI wafer. Compared with the previous other reports, our design can use relatively large area on the chip to… (More)


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