A 1.17 GHz wideband MEMS filter using higher order SH0 lithium niobate resonators

@article{Song2017A1G,
  title={A 1.17 GHz wideband MEMS filter using higher order SH0 lithium niobate resonators},
  author={Yong-Ha Song and Songbin Gong},
  journal={2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)},
  year={2017},
  pages={806-809}
}
This paper reports on the design, analysis, and demonstration of a lithium niobate (LiNbO3) wideband radio frequency (RF) microelectromechanical systems (MEMS) filter with a low insertion loss of 2.1 dB, a wide bandwidth of 4.9 %, and a spurious-free passband response at 1.17 GHz. Such high performance is achieved by arraying resonators designed with… CONTINUE READING