A 1.4µm front-side illuminated image sensor with novel light guiding structure consisting of stacked lightpipes

Abstract

A frontside illuminated image (FSI) sensor with novel light guiding structures consisting of stacked lightpipes was developed using 45nm Cu processing on 300 mm wafers. We demonstrated a high quantum efficiency (QE) of 75% and maximum incident angle of 40°, which exceeds the performance of backside illuminated image (BSI) sensors [1,2,3] 

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Cite this paper

@article{Watanabe2011A1F, title={A 1.4µm front-side illuminated image sensor with novel light guiding structure consisting of stacked lightpipes}, author={Hisashi Watanabe and Jun Hirai and Motonari Katsuno and Keishi Tachikawa and Sho Tsuji and Masao Kataoka and Saori Kawagishi and Hiroko Kubo and Hisashi Yano and Shigeru Suzuki and Gen Okazaki and Kouichi Yamamoto and Hiroshi Fujinaka and Takashi Fujioka and Masakatsu Suzuki}, journal={2011 International Electron Devices Meeting}, year={2011}, pages={8.3.1-8.3.4} }