A 0.001mm2 100µW on-chip temperature sensor with ±1.95 °C (3σ) Inaccuracy in 32nm SOI CMOS


We report an on-chip temperature sensor that uses the temperature-dependent reverse bias leakage current of a lateral SOI-CMOS pn diode to measure the thermal profile of a 32-nm microprocessor core. In this system, the diode junction capacitance is first charged to a fixed voltage. Subsequently, the diode capacitance is allowed to self-discharge by its… (More)
DOI: 10.1109/ISCAS.2012.6271670

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