[99l] - ADVANCES IN DESIGN OF MICROWAVE RESONANCE PLASMA SOURCE Abstract: ADVANCES IN DESIGN OF MICROWAVE RESONANCE PLASMA SOURCE

Abstract

ADVANCES IN DESIGN OF MICROWAVE RESONANCE PLASMA SOURCE A . L. Taube*(ataube@swin.edu.au), G. M. Demyashev (gdemyashev@groupwise.swin.edu), Yu. A. Shramkov Industrial Research Institute at Swinburne University of Technology PO Box 218, Hawthorn 3122, Melbourne, VIC, Australia Most applications of microwave power in industrial heating processes involve the use of relatively crude and inefficient microwave process cavities. However, recently the development of microwave technologies for a variety of new applications has led to novel designs of high efficiency resonant cavities. A microwave resonant cavity can be described as a resistant circuit element in a microwave network, where the frequency of resonance of the element is a function of its characteristic complex impedance. Our previous publications reported about exploitation of a single mode resonance cavity with a high efficiency for generation of microwave (MW) plasma at atmospheric pressure that was summarized elsewhere [1]. The microwave resonance plasma source (MRPS) of the TM01p single mode cylindrical cavity that was firstly published in 2001 [2] operates at atmospheric pressure as a plasma torch. The MRPS was designed assuming the resonant frequency of 2.45 GHz. This is the mode, which is characterized by an axially symmetric distribution of electric field strength. Predominantly, the single resonant mode cavities operating in the TM011 and TM013 were employed. From that time a lot of applications of the microwave resonance plasma source were developed. The original design of the single mode resonance cavity was advanced. State of the art summarizing recent advances in design of the TM01n single mode cylindrical resonance cavity is presented here. Different aspects of the MRPS design has been explored such as low pressure operation (~20 kPa), waveguideless microwave launch design, powder/liquid precursors feeding design, and variety of MW-power supply. The following sections summarize both the theoretical and experimental endeavors to explore these aspects. Low pressure MRPS design In order to treat polymer surfaces, a low temperature of plasma is required. Author Information: Alexander Taube (speaker) Industrial Research Institute

Cite this paper

@inproceedings{Taube200499lA, title={[99l] - ADVANCES IN DESIGN OF MICROWAVE RESONANCE PLASMA SOURCE Abstract: ADVANCES IN DESIGN OF MICROWAVE RESONANCE PLASMA SOURCE}, author={Alexander Taube and Yu . A . Shramkov and Swinburne Swinburne}, year={2004} }