9.9 A 0.6nm resolution 19.8mW eddy-current displacement sensor interface with 126MHz excitation

@article{Chaturvedi201799A0,
  title={9.9 A 0.6nm resolution 19.8mW eddy-current displacement sensor interface with 126MHz excitation},
  author={V. Chaturvedi and M. R. Nabavi and J. Vogel and K. Makinwa and S. Nihtianov},
  journal={2017 IEEE International Solid-State Circuits Conference (ISSCC)},
  year={2017},
  pages={174-175}
}
Displacement sensing with sub-nanometer resolution is required in advanced metrology and high-tech industry, e.g., to measure the lens position in wafer scanners. Linear encoders and interferometers are often used for this purpose, but they are bulky and costly. Capacitive sensors [1], though compact, are sensitive to environment and require electrical access to the target. Eddy-current sensors (ECSs) do not have these disadvantages, but their resolution and stability are limited by the skin… Expand
4 Citations
A 19.8-mW Eddy-Current Displacement Sensor Interface With Sub-Nanometer Resolution
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Eddy-Current Sensing Principle in Inertial Sensors
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