65nm SOI CMOS SoC Technology for Low-Power mmWave and RF Platform

@article{Kim200865nmSC,
  title={65nm SOI CMOS SoC Technology for Low-Power mmWave and RF Platform},
  author={D Kim and Jonghae Kim and Choongyeun Cho and J. O. Plouchart and Robert Trzcinski},
  journal={2008 IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems},
  year={2008},
  pages={46-49}
}
An RF and mm-wave platform developed in 65 nm SOI CMOS technology is presented. The SOI FET performance in a wired cell is measured up to fT=300 GHz and 200 GHz for NFET and PFET. Ring oscillator records 3.6 psec minimum inverter stage delay. Back-end-of-line vertical native capacitor (VNCAP) and on-chip inductor performances are reported. The performance… CONTINUE READING