5-GHz Antisymmetric Mode Acoustic Delay Lines in Lithium Niobate Thin Film
@article{Lu20205GHzAM, title={5-GHz Antisymmetric Mode Acoustic Delay Lines in Lithium Niobate Thin Film}, author={Ruochen Lu and Yansong Yang and Ming-Huang Li and Michael S. Breen and Songbin Gong}, journal={IEEE Transactions on Microwave Theory and Techniques}, year={2020}, volume={68}, pages={573-589} }
We present the first group of acoustic delay lines (ADLs) at 5 GHz using the first-order antisymmetric (A1) mode in Z-cut lithium niobate thin films. The demonstrated ADLs significantly surpass the operation frequencies of the prior art with similar feature sizes because of their simultaneously fast phase velocity, large coupling coefficient, and low loss. In this article, the propagation characteristics of the A1 mode in lithium niobate are analytically modeled and validated with finite…
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References
SHOWING 1-10 OF 91 REFERENCES
Gigahertz Low-Loss and Wideband S0 Mode Lithium Niobate Acoustic Delay Lines
- PhysicsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- 2019
The demonstrated S0 mode low loss and wideband acoustic delay lines can potentially enable wide-range and high-resolution delay synthesis that is highly sought after for the self-interference cancellation in full-duplex radios.
GHz Broadband SH0 Mode Lithium Niobate Acoustic Delay Lines
- PhysicsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- 2020
The design space of the SH0 mode ADLs at GHz is first theoretically investigated, showing that the large coupling and sufficient spectral clearance to adjacent modes collectively enable the broadband performance of SH0 delay lines.
S0-Mode Lithium Niobate Acoustic Delay Lines with 1 dB Insertion Loss
- Physics2018 IEEE International Ultrasonics Symposium (IUS)
- 2018
This paper demonstrates low-loss acoustic delay lines based on the fundamental symmetrical (S0)mode in lithium niobate thin films for the first time. The demonstrated devices harness the high…
Low-Loss and Wideband Acoustic Delay Lines
- PhysicsIEEE Transactions on Microwave Theory and Techniques
- 2019
This paper demonstrates low-loss acoustic delay lines (ADLs) based on shear-horizontal waves in thin-film LiNbO3 for the first time. Due to its high electromechanical coupling, the shear-horizontal…
An SH0 lithium niobate trans-impedance chirp compressor with high voltage gain
- Physics2018 IEEE Micro Electro Mechanical Systems (MEMS)
- 2018
We present a new type of acoustic devices that, for the first time, can simultaneously perform chirp compression and impedance transformation to achieve passive voltage amplification with a gain of…
Delay lines based on a suspended thin film of X-cut lithium niobate
- Physics2017 IEEE International Ultrasonics Symposium (IUS)
- 2017
We report on the fabrication, experimental characterization, and theoretical modeling of delay lines fabricated on a lithium niobate X-cut thin film substrate. We demonstrate the feasibility of…
Toward Ka Band Acoustics: Lithium Niobate Asymmetrical Mode Piezoelectric MEMS Resonators
- Engineering2018 IEEE International Frequency Control Symposium (IFCS)
- 2018
This work presents a new class of micro-electro-mechanical system (MEMS) resonators toward Ka band (26.5-40 GHz) for fifth-generation (5G) wireless communication. Resonant frequencies of 21.4 and…
Design and Fabrication of S0 Lamb-Wave Thin-Film Lithium Niobate Micromechanical Resonators
- PhysicsJournal of Microelectromechanical Systems
- 2015
Commercial markets desire integrated multifrequency band-select duplexer and diplexer filters with a wide fractional bandwidth and steep roll-off to satisfy the ever-increasing demand for spectrum.…
A Radio Frequency Nonreciprocal Network Based on Switched Acoustic Delay Lines
- PhysicsIEEE Transactions on Microwave Theory and Techniques
- 2019
The four-port circulator is built upon a recently reported frequency-independent, programmable, nonreciprocal framework based on switched delay lines, illustrating that the key to better performance and low-cost modulation signal synthesis lies in a large delay.
High-Performance SAW Resonator on New Multilayered Substrate Using LiTaO3 Crystal
- Materials ScienceIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- 2017
A band 25 duplexer with very narrow duplex gap was successfully developed, which shows extremely low insertion loss, steep cutoff characteristics, and stable temperature characteristics.