4K-cells Resistive and Charge-Base-Capacitive Measurement Test Structure Array (R-CBCM-TSA) for CMOS Logic Process Development, Monitor and Model

Abstract

To maximize the design efficiency of the test chip area and maintain the high accuracy measurement requirement of resistors and capacitors, a 4K-cells resistive and charge-base capacitive test structure array is designed for CMOS logic process development, monitor and model. The test chip utilizes 4-terminal (one of 4 is strongly grounded) Kelvin force… (More)

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