3I-5 Design and Fabrication of Temperature Compensated Liquid FBAR Sensors

@article{Bjurstrom20063I5DA,
  title={3I-5 Design and Fabrication of Temperature Compensated Liquid FBAR Sensors},
  author={J. Bjurstrom and Gunilla {\"O}lund Wingqvist and Ventsislav Yantchev and Ilia Katardjiev},
  journal={2006 IEEE Ultrasonics Symposium},
  year={2006},
  pages={898-901}
}
In this work we demonstrate a practically complete temperature compensation of the second harmonic shear mode in composite AlN/SiO2 FBAR's in the temperature range 25degC to 95degC. The main advantages of this mode over the fundamental mode are its higher Q value in liquids as well as its higher frequency and hence higher resolution for sensor applications. For comparative reasons the non-compensated fundamental shear mode is also included in these studies. Both modes have been characterized… CONTINUE READING
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SHOWING 1-10 OF 12 REFERENCES

and M

  • J. Weber, W. M. Albers, J. Tuppurainen, M. Link, R. Gabl, W. Wersing
  • Schreiter, "Shear mode FBARs as highly sensitive…
  • 2006
Highly Influential
6 Excerpts

and P

  • S. Rey-Mermet, R. Lanz
  • Muralt, "Bulk acoustic wave resonator operating…
  • 2006
1 Excerpt

and A

  • G. Wingqvist, J. Bjurstrom, L. Liljeholm, I. Katardjiev
  • L. Spetz, "Shear mode AlN thin film…
  • 2005
1 Excerpt

and M

  • H. Zhang, M. S. Marma, E. S. Kim, C. E. McKenna
  • E. Thompson, "A film bulk acoustic resonator in…
  • 2005

and J

  • R. Gabl, E. Green, +7 authors W. Reichl
  • Runck, "Novel Integrated FBAR Sensors: A…
  • 2003
1 Excerpt

and R

  • R. Brederlow, S. Zauner, +10 authors R. Aigner
  • Thewes, "Biochemical sensors based on bulk…
  • 2003
1 Excerpt

Improved bulk wave resonator coupling coefficient for wide bandwidth

  • K. M. Lakin, J. Belsick, J. F. McDonald, K. T. McCarron
  • 2001
1 Excerpt

Power handling and temperature coefficient studies in FBAR duplexers for the 1900 MHz PCS band,

  • III J.D. Larson, III J.D. Ruby, R. C. Bradley, J. Wen, K. Shong-Lam, A. Chien
  • 2000
1 Excerpt

Temperature compensated bulk acoustic thin film resonators,

  • K. M. Lakin, K. T. McCarron, J. F. McDonald
  • 2000
1 Excerpt

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