3I-5 Design and Fabrication of Temperature Compensated Liquid FBAR Sensors

  title={3I-5 Design and Fabrication of Temperature Compensated Liquid FBAR Sensors},
  author={J. Bjurstrom and Gunilla {\"O}lund Wingqvist and Ventsislav Yantchev and Ilia Katardjiev},
  journal={2006 IEEE Ultrasonics Symposium},
In this work we demonstrate a practically complete temperature compensation of the second harmonic shear mode in composite AlN/SiO2 FBAR's in the temperature range 25degC to 95degC. The main advantages of this mode over the fundamental mode are its higher Q value in liquids as well as its higher frequency and hence higher resolution for sensor applications. For comparative reasons the non-compensated fundamental shear mode is also included in these studies. Both modes have been characterized… CONTINUE READING
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