3D nanovision for the inspection of micro-electro-mechanical systems

Abstract

Micro-electro-mechanical systems (MEMS) are found in area applications such as the automotive industry, the aviation industry, the semiconductor industry, the medical field, and various other fields where miniaturization is taking over. The accurate measurement of features on the surface of MEMS is an important tool for the assessment and monitoring of… (More)
DOI: 10.1109/ICECS.2005.4633376

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