3D morphology reconstruction of high aspect ratio MEMS structure by using autofluorescence of Parylene C

@article{Zhang20153DMR,
  title={3D morphology reconstruction of high aspect ratio MEMS structure by using autofluorescence of Parylene C},
  author={Lingqian Zhang and Yaoping Liu and Fang Yang and Wei Min Wang and Dacheng Zhang and Zhihong Li},
  journal={2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2015},
  pages={358-360}
}
This paper reported a MEMS fabrication compatible, damage free method for in-process 3D morphology reconstruction of high aspect ratio microstructure. As a novel morphology tracer, Parylene C thin film was conformally deposited onto the structure and annealed at high temperature under N2. The autofluorescence of Parylene C was considerably enhanced by the… CONTINUE READING