3D inductors with nanowire through substrate vias


This paper presents a novel 3D inductor (solenoid) fabricated on a 50-pm thick AAO membrane using nanowire-vias. Several inductors were fabricated in this simple and low-cost technology with nanowires. They were measured up to 110 GHz and compared to the state-of-the-art results presented in the literature in different technologies: CMOS, glass, LCP and… (More)

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@article{Serrano20173DIW, title={3D inductors with nanowire through substrate vias}, author={Ariana Lacorte Caniato Serrano and Joana M. Pinheiro and S. Jeongi and Luis Gonzaga Gomes and R. C. A. Alvarenga and Ph. Ferrari and Gustavo P. Rehder}, journal={2017 IEEE MTT-S International Microwave Symposium (IMS)}, year={2017}, pages={1641-1644} }