3D high aspect ratio, MEMS integrated micro-solenoids and Helmholtz micro-coils

@article{Badilita20093DHA,
  title={3D high aspect ratio, MEMS integrated micro-solenoids and Helmholtz micro-coils},
  author={Vlad Badilita and Kai Kratt and Tobias Burger and J. G. Korvink and Ulrike Wallrabe},
  journal={TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference},
  year={2009},
  pages={1106-1109}
}
High-aspect-ratio 3D geometrically perfect solenoidal micro-coils are fabricated for the first time in a fully MEMS-integrated technology. Vertical micro-coils with up to 15 windings and diameters down to 100µm have been wound using an automatic wirebonder around SU8 and PMMA cylindrical posts. Using this method we also fabricate Helmholtz micro-coils capable to generate magnetic fields of 1mT, according to simulations. We demonstrate the potential to use large arrays of solenoidal micro-coils… CONTINUE READING
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A New Fabricatio Microfluidic Microstruct Photoresist

  • C.-H. Lin, G.-B. Lee, B.-W Chang
  • J. Micromech 590–597
  • 2002
Highly Influential
3 Excerpts

Electromagnetic Micro Ge of 3 D Micro Coils Oppo Membrane ” , in press

  • K. Kratt
  • 2007

Y

  • J. Lee, M. Mayer
  • Zhou, and Tail Breaking Force Op Bonding Process…
  • 2007
1 Excerpt

M

  • B. Mack, K. Kratt
  • S “Electromagnetic Micro Ge of 3D Micro Coils…
  • 2000
1 Excerpt

Design and T Microreceiver Coil Appara Resonance and Imaging Jackman “ Using Microcontact Printin on Capillaries for High Re Nanoliter Volumes ”

  • K. Kuwana, K. Ehrmann, +6 authors B.-W Chang
  • 1997

Jackman “Using Microcontact Printin on Capillaries for High Re Nanoliter Volumes

  • R.J.J.A. Rogers
  • Appl. P pp
  • 1997
1 Excerpt

Magin, and and Analysis of Microcoil

  • R.L.T.L. Peck
  • Journal of Magnetic Reson 124,
  • 1995
1 Excerpt

Pull Force timization of the Crescent lated Au Wire ”

  • M. Stettler Vincent, R. Popovic, J. Persic

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