3D heterogeneous integrated monolayer graphene Si-CMOS RF gas sensor platform

Abstract

We report the first monolithically integrated CMOS-monolayer graphene gas sensor, with a minimal number of essential post-CMOS processing steps, demonstrating a platform technology that enables integration of nascent two-dimensional materials with the low latency, low power and cost advantages of silicon CMOS (Si-CMOS) platform. Heterogeneous integration of… (More)

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