3D heterogeneous integrated monolayer graphene Si-CMOS RF gas sensor platform


We report the first monolithically integrated CMOS-monolayer graphene gas sensor, with a minimal number of essential post-CMOS processing steps, demonstrating a platform technology that enables integration of nascent two-dimensional materials with the low latency, low power and cost advantages of silicon CMOS (Si-CMOS) platform. Heterogeneous integration of… (More)


7 Figures and Tables

Slides referencing similar topics