3D fabrication and manipulation of hybrid nanorobots by laser for single cell analysis

Abstract

We developed fabrication and manipulation of hybrid nanorobos by 3D nano exposure and optical tweezers. Hybrid nanorobot is composed of photoresist and silicon nanowire. The robot is fabricated by femtosecond laser exposure and is connected by a micropillar on the glass substrate. The robot is released by cut of the pillar by ablation with femtosecond laser… (More)
DOI: 10.1109/MHS.2012.6492498

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@article{Fukada20123DFA, title={3D fabrication and manipulation of hybrid nanorobots by laser for single cell analysis}, author={Shota Fukada and Hisataka Maruyama and Taisuke Masuda and Fumihito Arai}, journal={2012 International Symposium on Micro-NanoMechatronics and Human Science (MHS)}, year={2012}, pages={479-481} }