335 - B 11 an Electrostati P Wobble

Abstract

The fabrication, initial modelling and first results of an electrostatic lower stator axial gap wobble motor are presented. The four mask fabrication process is based on polysilicon surface micromachining techniques. Three to twelve stator pole wobble motor designs have been realized with rotor radii of 50 and 100 micrometer. A theoretical model predicts… (More)

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@inproceedings{MOTO2008335B, title={335 - B 11 an Electrostati P Wobble}, author={WOBBLE MOTO and Rob Legtenberg and Erwin J. W. Berenschot and Miko Elwenspoek}, year={2008} }