3 - Axis accelerometer and strain sensor readout for MEMS - based capacitive sensors

  • C.A.P van Liempd
  • Published 2011


A low-power capacitive readout for MEMS-based strain sensors and accelerometers is presented. A novel technique to optimise the trade-off between gain, bandwidth and noise is introduced. The readout can work with both types of sensors in the range of ±2.5g and ±20,000 μe. Artefact cancellation such as residual motion is suppressed due to accurate control of… (More)


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