2P1-A18 Flow Metering Valve for Pneumatic Actuators Using Particle Excitation by PZT Vibrator : 4th report Development of small size the second machine fixing oscillator by using bolt

@inproceedings{Hirooka20092P1A18FM,
  title={2P1-A18 Flow Metering Valve for Pneumatic Actuators Using Particle Excitation by PZT Vibrator : 4th report Development of small size the second machine fixing oscillator by using bolt},
  author={Daisuke Hirooka and Koichi Suzumori and Takefumi Kanda and Kazutoshi Kono},
  year={2009}
}