In this work, we present a new two-dimensional mathematical modeling in a cylindrical coordinate system which computes the time evolution of trapped charges in Al<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> material due to irradiation by primary electrons. A reaction-diffusion equation expressing the spatial distribution of free charges fluxes in the material… (More)

An analytical model of the diffusive scattering of low-energy electrons in electron-beam resists

B. K. Paul

Micorleectronic Engineering, vol. 49,pp.233-244

1999

J

R. W. Nosker

Appl. Phys., vol. 40, 1872-

1969

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@article{Aoufi20122DRC,
title={2D reaction-diffusion computation of charge trapping evolution in dielectric materials submitted to an electron beam irradiation},
author={A. Aoufi and G. Damamme},
journal={2012 25th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV)},
year={2012},
pages={396-397}
}