2.5 rad/sec/sup 2/ resolution digital output MEMS-based rotational accelerometer for HDD applications

@article{Gola200225R2,
  title={2.5 rad/sec/sup 2/ resolution digital output MEMS-based rotational accelerometer for HDD applications},
  author={Anna Gola and F. Pasolini and E. Chiesa and Ernesto Lasalandra and M. Tronconi and T. Ungretti and Andrea Baschirotto},
  journal={Digest of the Asia-Pacific Magnetic Recording Conference},
  year={2002},
  pages={CP1-CP1}
}
Mechanical vibration of a HDD can cause head mis-positioning. This effect can be compensated by using the device presented in the following. It is a capacitive rotational accelerometer sensor which uses MEMS. The vibrations of the disk drive cause tiny rotational displacements of the moving part of the MEMS structure, which are measured by sensing the small variations in capacitance that they cause. Capacitance changes as small as 0.05 fF can be measured by the device. The device operates as… CONTINUE READING