100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process

@article{Senkal2014100KQT,
  title={100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process},
  author={Doruk Senkal and Sina Askari and Mohammed Jalal Ahamed and Eldwin J. Ng and Vu A. Hong and Yushi Yang and Chae H. Ahn and T. W. Kenny and A. M. Shkel},
  journal={2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2014},
  pages={24-27}
}
This paper reports a new type of degenerate mode gyroscope with measured Q-factor of > 100,000 on both modes at a compact size of 1760 μm diameter. The toroidal ring gyroscope consists of an outer anchor ring, concentric rings nested inside the anchor ring and an electrode assembly at the inner core. Current implementation uses n = 3 wineglass mode, which is inherently robust to fabrication asymmetries. Devices were fabricated using high-temperature, ultra-clean epitaxial silicon encapsulation… CONTINUE READING
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