1.52-GHz micromechanical extensional wine-glass mode ring resonators

@article{Xie2008152GHzME,
  title={1.52-GHz micromechanical extensional wine-glass mode ring resonators},
  author={Yuan Xie and Sheng-Shian Li and Yu-Wei Lin and Zeying Ren and C.T.-C. Nguyen},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2008},
  volume={55},
  pages={890-907}
}
Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-glass-mode shape to achieve lower impedance than previous UHF resonators, have been demonstrated at frequencies as high as 1.2 GHz with a Q of 3,700, and 1.52 GHz with a Q of 2,800. The 1.2-GHz resonator exhibits a measured motional resistance of 1 MOmega with a dc-bias voltage of 20 V, which is 2.2 times lower than the resistance measured on radial contour- mode disk counterparts at the same frequency. The… CONTINUE READING

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