1-to-32 H-tree optical distribution on adhesively bonded silicon nanomembrane

Abstract

We developed an adhesive bonding process to integrate silicon nanomembranes onto silicon chips. A grating-coupled 1-to-32 H-tree optical distribution is experimentally demonstrated with an excess loss of 2.2 dB and a uniformity of 0.72 dB. 

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Cite this paper

@article{Zhang20141to32HO, title={1-to-32 H-tree optical distribution on adhesively bonded silicon nanomembrane}, author={Yang Zhang and Xiaochuan C Xu and David Kwong and John Covey and Amir Hosseini and Ray T. Chen}, journal={2014 Conference on Lasers and Electro-Optics (CLEO) - Laser Science to Photonic Applications}, year={2014}, pages={1-2} }