1 MILLION Q-FACTOR DEMONSTRATED ON MICRO-GLASSBLOWN FUSED SILICA WINEGLASS RESONATORS WITH OUT-OF-PLANE ELECTROSTATIC TRANSDUCTION

@inproceedings{Senkal20141MQ,
  title={1 MILLION Q-FACTOR DEMONSTRATED ON MICRO-GLASSBLOWN FUSED SILICA WINEGLASS RESONATORS WITH OUT-OF-PLANE ELECTROSTATIC TRANSDUCTION},
  author={Doruk Senkal and Mohammed Jalal Ahamed and Sina Askari and Andrei M. Shkel},
  year={2014}
}
In this paper, for the first time, we report Q-factor over 1 million, on both modes, and high frequency symmetry (∆f/f ) of 132 ppm on wafer-level micro-glassblown 3-D fused silica wineglass resonators at a compact size of 7 mm diameter and center frequency of 105 kHz. In addition, we demonstrate for the first time, out-ofplane capacitive transduction on MEMS wineglass resonators. High Q-factor is enabled by a high aspect ratio, self-aligned glassblown stem structure, careful surface treatment… 

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