Corpus ID: 50900375

1 1 TM Grating Coupler on Low-Loss 2 LPCVD based Si 3 N 4 Waveguide Platform 3

@inproceedings{Dabos201711T,
  title={1 1 TM Grating Coupler on Low-Loss 2 LPCVD based Si 3 N 4 Waveguide Platform 3},
  author={G. Dabos and A. Manolis and A. L. Giesecke and C. Porschatis and B. Chmielak and T. Wahlbrink and N. Pleros and D. Tsiokos},
  year={2017}
}
  • G. Dabos, A. Manolis, +5 authors D. Tsiokos
  • Published 2017
  • We demonstrate, for the first time to our knowledge, a fully etched TM grating coupler for low-loss 12 Low-Pressure-Chemical-Vapor-Deposition (LPCVD) based silicon nitride platform with a coupling 13 loss of 6.5 dB at 1541 nm and a 1 dB bandwidth of 55 nm, addressing applications where TM 14 polarization is a pre-requisite. The proposed GC and the 360 nm × 800 nm strip based Si3N4 15 waveguides have been fabricated by optical projection lithography using an i-line stepper tool enabling 16 low… CONTINUE READING

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