1 1 TM Grating Coupler on Low - Loss 2 LPCVD based Si 3 N 4 Waveguide Platform 3


We demonstrate, for the first time to our knowledge, a fully etched TM grating coupler for low-loss 12 Low-Pressure-Chemical-Vapor-Deposition (LPCVD) based silicon nitride platform with a coupling 13 loss of 6.5 dB at 1541 nm and a 1 dB bandwidth of 55 nm, addressing applications where TM 14 polarization is a pre-requisite. The proposed GC and the 360 nm… (More)


4 Figures and Tables