Corpus ID: 53498828

) 1 Surface Modification of Electroosmotic Silicon 2 Microchannel using Thermal Dry Oxidation 3

@inproceedings{Yaakub20181S,
  title={) 1 Surface Modification of Electroosmotic Silicon 2 Microchannel using Thermal Dry Oxidation 3},
  author={T. Yaakub and J. Yunas and R. Latif and A. A. Hamzah and F. R. Wee and B. Majlis},
  year={2018}
}
A simple fabrication method in the surface modification of electroosmotic silicon 14 microchannel using thermal dry oxidation is presented. The surface modification is done by coating 15 the silicon surface with a silicon dioxide (SiO2) layer using thermal oxidation process. The process 16 is aimed not only to improve the surface quality of the channel to be suitable for electroosmotic fluid 17 transport but also to reduce the channel width using a simple technique. Initially, the parallel 18… Expand

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