(Invited) Reference Materials 8096 and 8097 - The Microelectromechanical Systems 5-in-1 Reference Materials: Homogeneous and Stable

@inproceedings{Cassard2014InvitedRM,
  title={(Invited) Reference Materials 8096 and 8097 - The Microelectromechanical Systems 5-in-1 Reference Materials: Homogeneous and Stable},
  author={Janet M. Cassard and Jon C. Geist and John Kramar},
  year={2014}
}

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