‘Old Chemistries’ for new applications: Perspectives for development of precursors for MOCVD and ALD applications

@inproceedings{Devi2013OldCF,
  title={‘Old Chemistries’ for new applications: Perspectives for development of precursors for MOCVD and ALD applications},
  author={Anjana Devi},
  year={2013}
}
Abstract The concept of the transformation of molecules to materials has been well established in the field of chemical vapor deposition (CVD) and atomic layer deposition (ALD). However, materials scientists are always on the lookout for new materials with enhanced functionalities for eventual application in devices. New materials have become an integral part of modern day technology especially in the field of microelectronics and optoelectronics. The importance of CVD and ALD processes for… CONTINUE READING