Zul Azhar Zahid Jamal

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The control of the growth of silicon dioxide (SiO(2)) and the formation of quantum dots (QDs) play an important role in the fabrication of single-electron transistors (SETs). In this work, SET structures were fabricated using a systematic oxidation technique known as the pattern-dependent oxidation (PADOX) process. For comparison, two oxidation processes(More)
Micro Electro Mechanical System (MEMS) is an emerging engineering field that owes so much to material and its processing technologies. It is proven to be capable of enhancing the performance of many devices traditionally produced using conventional microscale manufacturing methods. However, the manufacturing involves requires quite substantial investment in(More)
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