Zoltán Szucs

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In this paper we present a novel method for reliability testing of MEMS devices containing movable structures. A small size, simple and cheap vibration fatigue test equipment was designed and realized at BUTE and vibration fatigue tests were carried out on 10 samples of a LIS0L02AS4-type MEMS 3-axis inertial sensor provided by ST Microelectronics. The paper(More)
– In this paper the methodology and the results of a contactless thermal characterization of a high temperature test chamber will be introduced. The test chamber is used for fatigue testing of different MEMS devices where the homogenous temperature distribution within the close proximity from the heating filaments is very important. Our aim was to(More)
The paper discusses the importance and the issues of interfacing capacitive sensors. Two architectures applicable for interfacing capacitive sensors are presented. The first solution was designed to interface a capacitive humidity sensor designed and built for a humidity-dependent monolithic capacitor developed at Budapest University of Technology and(More)
BACKGROUND One of the most instrument demanding and expensive supplying sectors ofthe Health Care Systems is the anesthesia and the intensive therapy. In this professional sector with the support of our work a precise information system would be carried out and with the support of it not only the quality assurance and control but after applying a suitably(More)
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