- Full text PDF available (4)
—This work is concerned with generating the digital elevation models (DEMs) from the SAR images of the region of interest using multiple sensor arrays that are fixed on the distributed satellites. We present an exact estimate of the unwrapped phase and the relationship between the unwrapped phase and the terrain height. The optimum scheme that jointly… (More)
With the emerging of highly automated and flexible manufacturing systems in semiconductor fabrication, reliability and optimal productivity of such systems require very intelligent and complex control systems. Deadlock issue arises easily in these systems due to shared equipment usage and high production flexibility. This paper presents a new event-based… (More)
— A run-by-run feedback controller is designed for Intel manufacturing fabs to stabilize the critical dimension in the process of photolithography, in the presence of unpredictable process drift and unknown non-Gaussian disturbances. The controller is a combination of an adaptive model with an H∞ feedback.