Learn More
The paper presents a piezoresistive absolute micro pressure sensor, which is of great benefits for altitude location. In this investigation, the design, fabrication, and test of the sensor are involved. By analyzing the stress distribution of sensitive elements using finite element method, a novel structure through the introduction of sensitive beams into(More)
Presented in this paper is a micro-resonant acceleration sensor based on the frequency shift of quartz double ended tuning fork (DETF). The structure is silicon substrate having a proof mass supported by two parallel flexure hinges as doubly sustained cantilever, with a resonating DETF located between the hinges. The acceleration normal to the chip plane(More)
x{ Scope and Purpose. | We consider a scheduling problem in a two-processor system where (i) every job can be processed on only one machine and where (ii) there are chain-type precedence relations among the jobs. The goal is to minimize the makespan. This continues the work of Chang and Lee 1], Jansen 4] and of Kellerer and Woeginger 5]. Abstract. | We(More)
Presented is the geometry optimization for piezoresistive absolute micro-pressure sensor. A figure of merit called the performance factor (PF) is defined as a quantitative index to describe the comprehensive performances of a sensor including sensitivity, resonant frequency, and acceleration interference. Three geometries are proposed through introducing(More)
  • 1