Zhengcai Cao

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The paper describes an approach to scheduling for semiconductor wafer fabrication. In order to effectively analyze of control for semiconductor wafer fabrication, a Hierarchical colored timed Petri net (HCTPN) modeling technology based on the comprehensive analysis of the semiconductor manufacturing process was proposed. Due to the wide acceptance of(More)
In this paper, a mixed controller for solving the trajectory tracking and point stabilization problems of a mobile robot is presented, applying the integration of backstepping technique and neural dynamics. By introducing a virtual target point, the whole motion process is divided into two parts. The first one is employed to realize tracking control and the(More)
In this paper, a sensor-based motion planning method for robot arm manipulators operating among unknown obstacles of arbitrary shape is presented. It can be applied to on-line collision avoidance with no prior knowledge of the obstacles. The sensitive skin is used to build a description of the robot’s surroundings. This approach is based on the(More)
Scheduling in semiconductor manufacturing system is an important task for the industries faced with a large amount of resource competitions. Effective scheduling can improve the overall system performance and customer satisfaction. In this paper, a scheduling method with the core of bottleneck equipment control is designed referring to Drum-Buffer-Rope(More)
Simulation model is extensively used for evaluation of dispatching rules in semiconductor wafer fabrication. However, due to the high complexity of the simulation model, the simulation is so time-consuming that it cannot response to the dynamic changes of practical fabrication well. In order to reduce computer execution time and in the same time maintain(More)
An innovative approach to hydrogen reactor modeling based on Adaptive Neuro-Fuzzy Inference System (ANFIS) is proposed to improve the approximating and self-adaptive ability of existing models. To exert the information of the hydrogen reactor operation data for constructing the optimization model reasonably, the adaptive neural network algorithm is combined(More)
In this work, a novel point stabilization control strategy for mobile robots which moves on uneven surface is presented. Firstly, sliding mode method is adopted to extend the nonlinear kenimatic control law to dynamic system, so that the robot is driven by torques. Then, to solve the speed and torque jump problem, the neural dynamics model is integrated(More)