Yushi Yang

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Micromechanical resonators are promising replacements for quartz crystals for timing and frequency references owing to potential for compactness, integrability with CMOS fabrication processes, low cost, and low power consumption. To be used in high performance reference application, resonators should obtain a high quality factor. The limit of the quality(More)
  • Eldwin J Ng, Yushi Yang, Vu A Hong, Chae Hyuck Ahn, David L Christensen, Brian A Gibson +3 others
  • 2013
This paper reports the use of movable electrodes that can be electrostatically pulled in to achieve narrow gaps beyond lithography / etch capabilities. Width-extensional resonators with frequencies of 50 MHz and quality factors of 150k are demonstrated with such movable electrodes to have a significantly lower motional impedances when pull-in occurs.(More)
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