Yun-Pei Lu

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This paper studies the issues of designing a Bayesian framework for the reliable diagnosis of various yield-loss factors induced in semiconductor manufacturing. The proposed framework integrates both the results from knowledge-based and data-driven inference tools as input data, where the former resembles expert's knowledge on diagnosing pre-known(More)
A Bayesian Ranking Scheme is proposed for the reliable diagnosis of various yield-loss factors induced in semiconductor manufacturing. The aim is to cope with three problems: (FICV) false identification due to confounding variables, (FISV) false identification due to suppressor variables, and (MISC) miss identification due to severe multicollinearity. The(More)
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