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In this paper, we will propose the neural networks integrated circuit (NNIC) which is the driving waveform generator of the 4.0, 2.7, 2.5 mm, width, length, height in size biomimetics microelectromechanical systems (MEMS) microrobot. The microrobot was made from silicon wafer fabricated by micro fabrication technology. The mechanical system of the robot was(More)
This paper discussed insect-type MEMS microrobot system which could locomote without using computer programs. Locomotion of the MEMS microrobot was generated using the analog circuit of artificial neural networks. We constructed the artificial neural networks as a bare chip integrated circuit (IC) which could mount on top of the MEMS microrobot. As a(More)
This paper proposes an impact-type microelectro mechanical systems (MEMS) rotary actuator and application for a millimeter-scale MEMS microrobot. The rotational motion of the actuator was generated by vibration of a multilayer piezoelectric element. The size of the fabricated actuator was 1.0 mm × 4.4 mm × 3.2 mm. The fabricated actuator was controlled by(More)
In this paper, we report the hexapod type micro robot controlled by the neural networks. MEMS (Micro Electro Mechanical System) technology that based on the semiconductor process is used for fabrication of the microrobot. The rotational actuator is composed of four artificial muscle wires that is family of SMA (shape memory alloy). The power type bare chip(More)
A mathematical analysis of equilibrium was adapted on a practical 2-site immunoradiometric assay (IRMA) using 10 murine monoclonal antibodies (Mabs) to human TSH. The affinity constant of 10 Mabs was from 2.5 x 10(8) to 3.3 x 10(10) M-1. The dose-response curves using appropriate combinations of Mab-coated bead and 125I-labeled Mab were compared with the(More)
This paper presented a driving circuit which can output a driving waveform of the piezoelectric element impact-type actuator. The piezoelectric element impact-type actuator generates the rotational movement which is necessary to move the legs of the micro electro mechanical systems (MEMS) microrobot. The MEMS microrobot is made from silicon wafers(More)
This paper discussed about less than 5mm in size hexapod locomotive type microrobot system. The microrobot system consisted by micro-mechanical systems which were fabricated by micro fabrication technology and micro-electro systems which was constructed by integrated circuit (IC) technology. Micro-mechanical systems were equipped with small size rotary type(More)
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