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Series-connected thin film piezoelectric elements can generate large output voltages. The output voltage ideally is proportional to the number of connections. However, parasitic capacitances formed by the insulation layers and derived from peripheral circuitry degrade the output voltage. Conventional circuit models are not suitable for predicting the(More)
In this paper, we describe about design and fabrication of a piezoelectric gyroscope with a trident tuning fork structure for MEMS processes. The PZT thin film on the silicon beam was used for driving source and detection. We obtained the PZT thin film with thickness of 3um by the sputtered. The report describes a design of the gyroscope and characteristics(More)
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