High mobility and c-axis orientated ZnO thin films were deposited on glass substrates using RF sputtering method at room temperature. Structural properties of ZnO thin films were investigated by X-ray diffraction (XRD). Surface morphology and roughness were studied with scanning electron microscopy (SEM) and atomic force microscopy (AFM). Electrical… (More)
[This corrects the article on p. 516 in vol. 48, PMID: 26668798.].
ZnO thin films were successfully grown on flexible plastic substrates using radio-frequency magnetron sputtering method at room temperature. The effects of the sputtering power on the quality of the ZnO films have been investigated. The results show that thin films were polycrystalline, with wurtzite structure and a strong preferred c-axis orientation… (More)