Yuan-Zhi Peng

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—Atomic force microscopy (AFM) is an advanced technique which aims to scan a sample through the use of a probe or a tip; however, conventional atomic force microscope system suffers from the limitation of small scanning range, due to the short travelling range of piezoelectric actuation. In this paper, we propose a large measurement-range AFM scanning(More)
In this paper, a novel design, control and implementation of a three degree-of-freedom (DOF) compact positioner is presented with high resolution in tens of nanometer-scale precision positioning and millimeter-level long travel range. According to the serial flexure mechanism design, whose motion comes from the elastic deformation of the flexure and the(More)
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