• Citations Per Year
Learn More
We experimentally demonstrate a micromachined reconfigurable metamaterial with polarization independent characteristics for multiple resonances in terahertz spectral region. The metamaterial unit cell consists of eight out-of-plane deformable microcantilevers placed at each corner of an octagon ring. The octagon shaped unit cell geometry provides the(More)
An all metal based electrostatic nanoelectromechanical switch has been fabricated using a one mask process. High temperature cycling behavior is demonstrated in a vacuum chamber at 300 °C for more than 28 hours. The compelling results indicate that the design is promising for the realization of rugged electronics with three-dimensional integration.
We present a nanoelectromechanical (NEM) relay which is capable of demonstrating two stable states without onhold power due to the influence of van der Waals force. This is realized by leveraging a silicon nanofin (SiNF) as a relay which can switch between two lateral terminals. The smallest dimension of the SiNF is 80 nm width by 2 μm length. The SiNF is(More)
  • 1