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We describe a novel control approach for form accuracy of microlenses with continuous relief by control of exposure threshold. The approach can be achieved by analysis of the exposure distribution on photoresist and by deriving a relationship between the exposure distributions and the internal photoactive compound concentration (PAC) of the photoresist. The(More)
A plasmonic lens with metallic chirped circular nanoslits corrugated on Au film supported on quartz substrate for the purpose of superfocusing was put forth and fabricated by means of focused ion beam direct milling technique. Topography of the lens was imaged using an atomic force microscope. After that a near-field scanning optical microscope was employed(More)
Considering the necessity of alignment in practical applications of photolithography, distribution of complex amplitude of moiré fringe patterns that are produced in superposition of two gratings is analyzed in the viewpoint of Fourier Optics and the relationship between fringes and properties of these two gratings is concluded by means of an analysis(More)
The Talbot effect of an Ag nanolens with five periodic concentric rings that are illuminated by the radially polarized light was numerically studied by means of rigorous finite-difference and time-domain (FDTD) algorithm. It was found that the Talbot effect occurs only when the incident wavelength is at the scale of less than half of period of the grating(More)
The hybrid Au-Ag triangular nanoparticles were proposed for the purpose of biosensing. To construct the nanoparticles, an Au thin film was deposited on top of the Ag nanoparticles supported with glass substrate. The hybrid nanoparticles can prevent oxidation of the pure Ag nanoparticles due to the Au protective layer caped on the Ag nanoparticles. The(More)
— Holes with different sizes from microscale to nanoscale were directly fabricated by focused ion beam (FIB) milling in this paper. Maximum aspect ratio of the fabricated holes can be 5:1 for the hole with large size with pure FIB milling, 10:1 for gas assistant etching, and 1:1 for the hole with size below 100 nm. A phenomenon of volume swell at the(More)
A nanopore array with diameter of approximately 30 nm was fabricated by use of focused ion beam (FIB) scanning and thin film coating on Si(100). A thin film of SiO2 with thickness of 200 nm (used as sacrificial layer) was coated by physical evaporation deposition (PVD) first. Next, the thin films of Aluminum with thickness of 500 nm were coated on the(More)
A new silver (Ag) nanostructure with a rectangular distribution array composed of rhombic nanoparticles is described here. The structure has an apparent advantage of strong hot spots that have a much higher signal intensity than that of the previously reported traditional triangular structures. It generates a great enhancement of a localized surface plasmon(More)
Many factors influence the near-field visualization of plasmonic structures that are based on perforated elliptical slits. Here, characterization errors are experimentally analyzed in detail from both fabrication and measurement points of view. Some issues such as geometrical parameter, probe-sample surface interaction, misalignment, stigmation, and(More)
Moiré interferometry is widely used as the precise metrology in many science and engineering fields. The schemes of moirés-based interferometry adopting diffraction gratings are presented in this paper for applications in a proximity lithographic system such as wafer-mask alignment, the in-plane twist angle adjustment, and tilts remediation. For the sake of(More)