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A sub-1-volt nanoelectromechanical switching device.
Nanoelectromechanical (NEM) switches have received widespread attention as promising candidates in the drive to surmount the physical limitations currently faced by complementary metal oxideExpand
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Elimination of Spurious Modes in SH0 Lithium Niobate Laterally Vibrating Resonators
This letter reports on a spurious mode suppression technique for the shear horizontal (SH0) mode lithium niobate laterally vibrating resonators. The concept utilizes triangular and arched edge shapesExpand
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An Extremely Low Contact-Resistance MEMS Relay Using Meshed Drain Structure and Soft Insulating Layer
This paper presents an electrostatically actuated microelectromechanical systems (MEMS) relay with a stacked-electrode structure having meshed drain electrode and a soft dielectric layer under theExpand
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An ultra-low voltage MEMS switch using stiction-recovery actuation
In this paper, an ultra-low voltage microelectromechanical system (MEMS) switch is proposed, modeled and demonstrated. Through the introduction of torsional hinges, stiction-recovery actuation wasExpand
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Wideband Spurious-Free Lithium Niobate RF-MEMS Filters
This paper reports on the demonstration of wideband spurious-free radio frequency micromechanical systems filters based on one-port shear horizontal (SH0) mode lithium niobate (LiNbO<sub>3</sub>)Expand
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Highly reliable MEMS relay with two-step spring system and heat sink insulator for power applications
This paper reports remarkably reliable MEMS relays having a unique two-step spring system and a heat sink insulator. The two-step spring system is designed to reduce Joule-heating by lowering contactExpand
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The reliability issues on ASIC/memory integration by SiP (system-in-package) technology
We review the advantages of using SiP first, and then some of the reliability issues are discussed, including leakage current, test, EMI (electromagnetic interference), EOS (electrical over stress) and latch-up. Expand
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Fast and robust cantilever switch with suppressed bouncing for ic applications
This paper reports a cantilever switch which provides fast switching and robustness using extended gate electrode and unique dimple structure. The gate electrode extended along the length of the beamExpand
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Analysis and Removal of Spurious Response in SH0 Lithium Niobate MEMS Resonators
This paper reports on the analysis and removal of transverse spurious modes in shear horizontal (SH0) mode lithium niobate (LiNbO3) laterally vibrating resonators (LVRs). A length-controlledExpand
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