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A processing quality prognostics scheme for plasma sputtering in TFT-LCD manufacturing
- Yu-Chuan Su, Min-Hsiung Hung, Fan-Tien Cheng, Yeh-Tung Chen
- IEEE Transactions on Semiconductor Manufacturing
A novel quality prognostics scheme (QPS) for plasma sputtering in TFT-LCD manufacturing processes is proposed. The QPS consists of a conjecture model and a prediction model. The conjecture model can… Expand