Yanquan Geng

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This letter presents a novel atomic force microscopy (AFM)-based nanomanufacturing method combining the tip scanning with the high-precision stage movement to fabricate nanochannels with ladder nanostructure at the bottom by continuous scanning with a fixed scan size. Different structures can be obtained according to the matching relation of the tip feeding(More)
This paper presents a reliable nanolithography technique, namely dynamic plowing lithography (DPL) based on a commercial atomic force microscope (AFM). The poly(methyl methacrylate) (PMMA) solution spinning on a silicon substrate is utilized to be scratched directly with an oscillating tip at its resonance frequency. The films with different thickness are(More)
We present experimental and theoretical results to describe and explain processing outcomes when producing nanochannels that are a few times wider than the atomic force microscope (AFM) probe using an AFM. This is achieved when AFM tip-based machining is performed with reciprocating motion of the tip of the AFM probe. In this case, different feed directions(More)
We show that an atomic force microscope (AFM) tip-based dynamic plowing lithography (DPL) approach can be used to fabricate nanoscale pits with high throughput. The method relies on scratching with a relatively large speed over a sample surface in tapping mode, which is responsible for the separation distance of adjacent pits. Scratching tests are carried(More)
In the present work, we perform molecular dynamics simulations corroborated by experimental validations to elucidate the underlying deformation mechanisms of single-crystalline aluminum under direct imprint using a rigid silicon master. We investigate the influence of crystallographic orientation on the microscopic deformation behavior of the substrate(More)
In the present work, we perform experiments and molecular dynamics simulations to elucidate the underlying deformation mechanisms of single crystalline copper under the load-controlled multi-passes nanoscratching using a triangular pyramidal probe. The correlation of microscopic deformation behavior of the material with macroscopically-observed machining(More)
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