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Ultra thin HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> triple-layer gate dielectrics for advanced MIS capacitors have been characterized electrically. The triple-layer gate stacks after post-metal annealing (PMA) at various temperatures have been studied. Experimental results including leakage current, C-V characteristics, and TDDB are(More)
A new procedure to determine source/drain series resistance and effective channel length has been developed for MOSFETs operated in linear region. The gate-bias dependence of source/drain resistance is considered by differential and integration processes. This new-developed procedure has been applied to devices with mask channel lengths of 0.23, 0.2, and(More)