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A linear-response capacitive tactile sensor is presented in this work. The sensor was fabricated by the TSMC 0.35 μ m CMOS process and our self-developed MEMS post-process. The structure of the… (More)
This study presents a novel single proof-mass 3-axis capacitive-type accelerometer design consisting of poly-Si rib-proofmass, springs, high-aspect-ratio in-plane sensing electrodes, and plate-type… (More)
IP lookup schemes in Internet routers can be broadly classified into two categories: static and dynamic. While static schemes improve lookup speed and reduce memory requirement by using… (More)
The fault tolerant tracking control problem for unknown nonlinear multi-input multi-output (ΜΙΜΟ) systems is investigated in this paper. A novel intelligent fault tolerant control (FTC) framework is… (More)
In this work, CMOS-based tactile sensors using oxide as the sacrificial layer was demonstrated. The multiple metal layers and dielectric layers in the backend of CMOS processes were used to fabricate… (More)