Y. Trouiller

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This paper presents a complete 90nm CMOS technology platform dedicated to advanced SoC manufacturing, featuring 16 (27-70nm transistors (standard process) or 21-90nm transistors (Low Power process) as well as 2.5 or 3.3V I/O transistors, copper interconnects and SiOC low-k IMD (k=2.9). The main critical process steps are described and electrical results are(More)
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