Y. C. Lam

Learn More
In large area micro hot embossing, process temperature plays a critical role in both the local fidelity of microstructure formation and global uniformity. Micro embossing at the lowest temperature with acceptable fidelity can improve the global flatness after demolding. This paper focuses on polymer deformation and recovery in micro embossing when the(More)
Multilayered ceramic substrates with embedded micro patterns are becoming increasingly important, for example, in harsh environment electronics and microfluidic devices. Fabrication of these embedded micro patterns, such as micro channels, cavities and vias, is a challenge. This study focuses on the process of patterning micro features on ceramic green(More)
  • 1